MS-Series：Corrosion-resistant mass flow meter

Customization ranges from: 0.5 SCCM arrive 5,000 SLPM

• Full spec sheet

MS series standard specifications

• Measuring range：0.5 SCCM to 5,000 SLPM
• Measuring range： 1% – 100% F.S.
• precision：Readings 0.8% and 0.2% F.S.
• Optional high accuracy：Readings 0.4% and 0.2% F.S.
• repeatability：±0.2% F.S.
• Response time：<10 millisecond
• Operating temperature：–10°C to +60°C
• Work pressure：160 PSIA (11 barA)

function

• • Volumetric flow is measured at the same time、Mass flow、Gas pressure and gas temperature。
  • Site adjustable engineering unit list and STP/NTP conditions。
  • from 98 Choose from a variety of pre-loaded NIST traceable gas calibrations。
  • Customize and store up to 5 kind of composition of gases 20 custom gas mixtures。
  • Use the integrated touchpad to read the measured values from the backlit display and control configuration。
  • Optional integrated dual flow accumulator and alarm