Standard accuracy: 0.8%RD+0.2%FS、High accuracy 0.4%RD+0.2%FS
Built-in 90-130 gas curves are optional
RESPONSE SPEED: 100MS
A wide range of digital signals are available
Performance/Parameters
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MC20 Series Mass Flow Controller
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Flow range
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0.5SCCM-5000SLPM
You can modify the flow rate unit by yourself, such as kg/h、g/min, etc
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Calibrated gases
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Built-in 90 gases are optional
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precision(After zeroing)
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±(0.8%Rd+0.2%FS)
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High precision(After zeroing)
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±(0.4%Rd+0.2%FS),Limited to 5SCCM-500SLPM
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repeatability
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±0.2%FS
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drift(Zero/full scale)
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0.02% F.S/oC/Atm
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Scope of work
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0.5-
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Response time
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100millisecond(adjust)
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Start warm-up time
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1seconds
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Standard operating conditions
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25oC & 14.696 psia,It can be customized
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Operating temperature range
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-10~-50℃(There are also high-temperature customized products)
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Operating humidity range
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0-RH(Non-condensing)
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Work pressure
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10Bar
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Mounting direction
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arbitrarily
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Valve status
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Normally closed |